Soft lithographic methods for nano-fabrication
نویسندگان
چکیده
Soft l i thography is a low-cost, non-photolithographic strategy for carrying out micloand nano-fabrication. This unconventional approach consists oftechniques based on self-assembly and replica moiding oforganic molecules and polyneric marerialsFour such techniques, microcontact printing (ICP). replica molding. micromolding in capil laries (MIMIC), and microtransfer molding (ITM ). have been demonstr.rted for the labrication of pallerns and structures of a variet! of materials with dimension > l0 nm. This review describes these techniques and theil applications in fabrication and nranufacturinc at the sub-100 nm scale.
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