Time-resolved measurements of the EEDF in a helicon plasma
نویسندگان
چکیده
An energy analyzer with the capability of making fast time-resolved measurements of the instantaneous electron current in a radiofrequency plasma has been designed and constructed. This current is then reconstructed into the instantaneous I-V characteristic at opposite phases of the RF cycle. Results are shown for the helicon wave discharge under various conditions. From the first derivative of the I-V characteristic, it is observed that there is a lack of high energy electrons characteristic of strong Landau damping, suggesting that some other mechanism is responsible for the discharge's high ionization efficiency. PACS numbers 52.50.Dg, 52.70.Ds, 52.80.Pi
منابع مشابه
EEDF MEASUREMENTS AND EXCITATION PROCESSES IN THE VICINITY OF A HELIUM DISCHARGE CONSTRICTION
Axial distributions of plasma and floating potentials, electron number density and the electron energy distribution function (EEDF) have been measured in the double layer (DL) region of an He discharge constriction. Excitation processes in the constriction region are studied. Using a linearization method for the nonstationary balance equations and choosing appropriate discharge conditions, ...
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