Detection of bacterial cells and antibodies using surface micromachined thin silicon cantilever resonators
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چکیده
منابع مشابه
Novel Fabrication Method for Surface Micromachined Thin Single-Crystal Silicon Cantilever Beams
This paper describes a novel technique for the fabrication of surface micromachined thin silicon cantilever beams using merged epitaxial lateral overgrowth (MELO) of silicon and chemical–mechanical polishing (CMP). The objective is to demonstrate the feasibility of using this novel technique for the fabrication of arrays of ultrathin, low-stress, single-crystal silicon cantilever beams for use ...
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