THz Detection by Thermopile Antenna
نویسندگان
چکیده
A novel MEMS thermopile structure is presented, which consist of linearly arranged pand ntype polysilicon strips instead of the conventional loop-like configuration. It is shown that these devices sense the millimeter wave radiation beyond the infrared. The polarity and frequency dependence of the sensitivity prove that these strips behave as absorbing antennas towards the microwave/millimeter wave radiation. The measured responsitivities to direct heating, infrared radiation, 13 GHz microwave radiation, 100 GHz millimeterwave and THz radiation are presented. © Selection and peer-review under responsibility of FET11 conference organizers and published by Elsevier B.V.
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