An Investigation of the Molecules 0 2, CHC13, c —C4F8, C7F14 and HBr by Electron Cyclotron Resonance (ECR) Technique at Energies < 0.4 eV

Preliminary experiments have shown that helium gas can be considered a good choice to be used in electron cyclotron resonance (ECR) studies, at the same time as a carrier gas and as a source of production of free electrons. An account of destruction of He metastable atoms present in the flowstream is given. Changes in the linewidth with or without the electron scavenger and thermalization of the electrons are discussed. The energy dependence for the electron attachment to the molecules 0 2, CHC13, c — C4F8, C7F14, and HBr is investigated. The energy scale for electron attachment processes in relation to the input microwave power is established for He carrier gas. Such processes can be studied by employing the ECR technique from thermal energies up to 0.4 eV.