O2 dissociation in Ar-O2 surface-wave microwave discharges
نویسندگان
چکیده
Oxygen dissociation in Ar-O2 microwave surface-wave discharges at p = 1 − 25 mbar is theoretically investigated, focusing on the dependence of the dissociation degree on pressure and on the mixture composition. It is shown that the dissociation degree is higher for high Ar content discharges, due to the modifications in the electron energy distribution function (EEDF) and to the effectiveness of the dissociation channel involving the Ar(4s) states in this case. Furthermore, for mixtures predominantly constituted by argon the dissociation degree passes through a minimum at pressures around 4-8 mbar, reflecting the peculiarities of the energy transfer from the microwave field to the electrons for the various electron energies.
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