Tribological Approach for Reliability and Durability of Ultrasonic Motor
نویسنده
چکیده
The reliability and durability of an ultrasonic motor is usually determined by wear at the contact interface between a drive and a driven element, due to its driving mechanism. Wear control is therefore essential as the key design input to achieve ultimate performance of the ultrasonic motor. In this paper, a high precision and small precise positioning linear stage with an ultrasonic motor as a promising stage for an electron-beam direct-writing system is introduced. It was realized by the optimum design of the overall system, including tribological materials and operating conditions from the viewpoint of wear control at the contact interface of the ultrasonic motor.
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