Vacuum Gauge to Vacuum Pump Valve
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منابع مشابه
Design and Simulation of Hot Cathode Ionization Vacuum Gauge with no X-Ray Limitations
In this paper, the MEMS type ionization gauge with no X-Ray limitations has been presented. Having the dimensions of 2.4 mm× 0.8mm × 1.4 mm, the designed gauge is 9000 times smaller than the conventional type and can operate in HV and UHV pressures up to 5×10-9 torr. Operating at the temperature of 750°C, the cathode of proposed gauge is implemented using nickel and works in a way in...
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