On-chip Si-based Bragg cladding waveguide with high index contrast bilayers.

نویسندگان

  • Yasha Yi
  • Shoji Akiyama
  • Peter Bermel
  • Xiaoman Duan
  • L Kimerling
چکیده

A new silicon based waveguide with full CMOS compatibility is developed to fabricate an on-chip Bragg cladding waveguide that has an oxide core surrounded by a high index contrast cladding layers. The cladding consists of several dielectric bilayers, where each bilayer consists of a high index-contrast pair of layers of Si and Si3N4. This new waveguide guides light based on omnidirectional reflection, reflecting light at any angle or polarization back into the core. Its fabrication is fully compatible with current microelectronics processes. In principle, a core of any low-index material can be realized with our novel structure, including air. Potential applications include tight turning radii, high power transmission, and dispersion compensation.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Low-loss high-index-contrast planar waveguides with graded-index cladding layers.

We experimentally demonstrate, for the first time, propagation loss reduction via graded-index (GRIN) cladding layers in high-index-contrast (HIC) glass waveguides. We show that scattering loss arising from sidewall roughness can be significantly reduced without compromising the high-index-contrast condition, by inserting thin GRIN cladding layers with refractive indices intermediate between th...

متن کامل

An all-silicon, single-mode Bragg cladding rib waveguide.

In this paper, we demonstrate a direct method of fabricating an all-silicon, single-mode Bragg cladding rib waveguide using proton beam irradiation and subsequent electrochemical etching. The Bragg waveguide consists of porous silicon layers with a low index core of 1.4 that is bounded by eight bilayers of alternating high and low refractive index of 1.4 and 2.4. Here, the ion irradiation acts ...

متن کامل

Fabrication and characterization of compact silicon oxynitride waveguides on silicon chips

We investigate silicon oxynitride (SiON) waveguides for long optical delay lines on a silicon chip. With the choice of a moderately low refractive index contrast, a balance can be achieved between compact waveguide cross-section and low loss. The material composition and refractive index are characterized by Rutherford backscattering spectrometry and ellipsometry. High-temperature annealing is ...

متن کامل

Integrated Biophotonics with CYTOP

We describe how the amorphous fluoropolymer CYTOP can be advantageously used as a waveguide cladding material in integrated optical circuits suitable for applications in integrated biophotonics. The unique refractive index of CYTOP (n = 1.34) enables the cladding material to be well index-matched to an optically probed sample solution. Furthermore, ultra-high index contrast waveguides can be fa...

متن کامل

Fluorescent liquid-core/air-cladding waveguides towards integrated optofluidic light sources.

We have demonstrated fluorescent liquid-core/air-cladding (LA) waveguides suitable for use as integrated optofluidic light sources. These waveguides were fabricated by conventional soft lithography using poly(dimethylsiloxane) (PDMS). Two-phase stratified flows of air and ethylene glycol with fluorescent dye were generated along the PDMS channel. Compared to the liquid-core/liquid-cladding (L(2...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:
  • Optics express

دوره 12 20  شماره 

صفحات  -

تاریخ انتشار 2004