Elastic constants and structural properties of nanometre-thick diamond- like carbon films
نویسندگان
چکیده
Carbon coatings of thickness down to 2 nm are needed to increase the storage density in magnetic hard disks and reach the 100-Gbitsyinch target. We show that the combination of surface Brillouin scattering, X-ray reflectivity and Raman spectroscopy 2 measurements allow us to measure the mechanical and structural properties of ultra-thin tetrahedral amorphous carbon films. Densities up to 2.8 gycm are found indicating a significant sp content even in the thinnest films. Surface Brillouin scattering 3 3 provides the dispersion relations of surface acoustic waves and from these the elastic constants of the films. The elastic constants of 2, 4 and 8 nm-thick films are measurably different. Our results show that these ultra-thin films reach the full stiffness of tetrahedral amorphous carbons when the thickness becomes of the order of 10 nm, but even the thinnest films have a Young’s modulus of at least ;100 GPa. The combination of surface sensitivity and resonant enhancement of UV Raman, with surface enhancement effects obtained by depositing the films on Al, allows the detection of the Raman spectrum, even for the thinnest films. This is the quickest non-destructive structural probe of nanometre-thick diamond-like carbon films. 2002 Elsevier Science B.V. All rights reserved.
منابع مشابه
Effect of bias voltage on structural and mechanical characteristics of diamond-like carbon thin film applied by ion beam deposition
This study, investigates the effect of bias voltage on structural changes of diamond-like carbon thin film created by ion beam deposition is investigated. For this purpose, the bias voltage in the values of 0 V, -50 V, -100 V and -150 V on the AA5083 aluminum alloy was considered. Raman spectroscopy was used to evaluate structural. Influence of the bias voltage on the thickness and roughness of...
متن کاملRoom-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition: Process Design, Film Structure and Film Properties
Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source, Thin Solid Films 517 (2009) 6502. spectroscopy of diamond-like carbon films deposited by an anode layer source, Diamond Relat. Mater. 17 DLC films deposited at room-temperature by reactive magnetron sputtering and by an anode layer source – a comparative study, Relation between structural/topol...
متن کاملEffect of Catalyst on the Growth of Diamond-like Carbon by HFCVD
Diamond like carbon (DLC) film was grown by hot filament chemical vapor deposition (HFCVD)technique. In the present work, we investigated the quality of the DLC films groew on the substratesthat were coated with various metal nanocatalysts (Au and Ni). A combination of CH4/Ar/H2 rendersthe growth of carbon nanostructures technique (diamond like carbon). The utilized samples werecharacterized by...
متن کاملRole of Sandwich Cu Layer in and Effect of Self-Bias on Nanomechanical Properties of Copper/Diamond-Like Carbon Bilayer Films
The role of sandwich Cu layer in and effect of self-bias on structural and nanomechanical properties of Cu/DLC bilayer films have been explored. Cu/DLC bilayer filmswere grown, under varied self-bias from−125 to−225V, using hybrid system involving radiofrequency(RF-) plasma-enhanced chemical vapor deposition and RF-sputtering units. Surface topography and mean roughness was studied by atomic fo...
متن کاملMechanical Properties of Ultrananocrystalline Diamond Thin Films Relevant to MEMS/NEMS Devices
The mechanical properties of ultrananocrystalline diamond (UNCD) thin films were measured using microcantilever deflection and membrane deflection techniques. Bending tests on several free-standing UNCD cantilevers, 0.5 μm thick, 20 μm wide and 80 μm long, yielded elastic modulus values of 916–959 GPa. The tests showed good reproducibility by repeated testing on the same cantilever and by testi...
متن کامل