Making Tunnel Junctions Possible: Design and Implementation of an Angular Deposition Device and Oxidation Process

نویسنده

  • David Bobela
چکیده

Modifications to an automated thermal evaporator were made: A device for angular evaporation was fabricated and a protocol for in vacuum oxidation was developed. The new features allow for versatile fabrication of metaltunnel junction-metal thin film samples. A discussion of the usefulness of tunnel junctions is provided.

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تاریخ انتشار 2002