Stability Analysis of Flexure Stage based Siso Nanopositioning Device
نویسندگان
چکیده
This paper presents open loop characteristics of the flexure stage based single input single output (SISO) nanopositioning device. The dynamic characteristics of the device have been analyzed. System characteristics can be improved by using different types of feedback controllers. To provide consistent, reliable and safe solution to the industrial control problems, different tuning schemes such as Ziegler Nichols and automatic tuning for Proportional Integral Derivative (PID) controller have been presented. Effectiveness of the proposed controller has been analyzed. Robust response time tuning of PID controller using adjustment performance parameters and robustness strategy has been done and analyzed. The effectiveness of the proposed control scheme for precise position tracking control of nanopositioning system has been demonstrated by simulation of results in MATLAB. Comparative analysis of different tuning techniques of PID controller has also demonstrated.
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