Fabrication of MEMS Using Cheap Substrates

The objective of this project was to create microelectromechanical systems (MEMS) using paper as the substrate and piezoresistive carbon ink to create a device that was sensitive to force. The idea behind this approach was to minimize cost and maximize ease of production. To achieve our objective, we used a paper cantilever design to correlate the relationship between force and change in resistance of the device, and subsequently the relationship between current and applied force. Our results showed a linear relationship. The next part of the project required us to apply this relationship to create a useful device. We opted on creating a microphone made from paper and the piezoresistive material. This was based on the fact that the relationship between force and resistance would facilitate the modulation of current in much the same way as the moving coil in a magnetic field in a conventional microphone. We were able to successfully accomplish our goals after several designs were tested and optimized.