Transient Behavior During Single Product Start Peaks in a Semiconductor Fabrication Facility
نویسنده
چکیده
In this study, we examine how wafer start peaks affect the performance of a semiconductor wafer fabrication facility. In contrast to other publications, we use a real factory model. In addition, we created two new types of analysis particularly suited for transient phases. The t-test diagram and the disturbance index provide useful support in finding disturbances in the factory and measuring the amount of disturbance.
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