ZnO Piezoelectric Films for Acoustoelectronic and Microenergetic Applications

Zinc oxide is one of the most popular materials for acoustoelectronic sensors and vibro-piezo-transducers used in nano-piezo-generators. In present paper, thick piezoelectric ZnO films are fabricated on both sides various substrates using magnetron sputtering technique. It shown that main problem double film deposition difference thermal expansion coefficients substrate materials. The solved by decreasing plate temperature up to 140 °C, reducing growing rate 0.8 ± 0.05 μm/h, diminishing oxygen content Ar mixture 40%. Using modified conditions, with thickness 15 μm, grain size 0.3 module as large 7.5 × 10−12 C/N faces quartz lithium niobate plates well flexible polyimide known Kapton. characterized chemical composition, crystallographic orientation, effect, acoustic wave generation. They applied vibro-piezo-transducer based ZnO/Kapton/Al/ZnO/Al structure. When structure mechanical excited, variable electric voltage about 35 mV generated. value sufficient an unstable energy source autonomic micro-energetic energy-store systems.