Zero-Bending Piezoelectric Micromachined Ultrasonic Transducer (pMUT) With Enhanced Transmitting Performance

Micromachined piezoelectric ultrasonic transducer with ultra-wide frequency bandwidth

Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

A square piezoelectric composite diaphragm was analyzed by the finite element method to enhance the sensitivity of a piezoelectric micromachined ultrasound transducer (pMUT). The structures of electrode and piezoelectric film were optimized and a centric electrode was designed to avoid the counteraction of stress in the centre and edges. In order to further improve the sensitivity; a pMUT with ...

Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents ...

Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducer Arrays

Air-coupled piezoelectric micromachined ultrasound transducer arrays, operating at ~190 kHz, have been fabricated utilizing an aluminum nitride piezoelectric layer. Improved fabrication processes have reduced the frequency variation seen in our previous work with single transducers resulting in arrays of transducers with resonant frequencies (fn) that match within the fractional half-power band...

Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics