X-ray microanalyses in the variable pressure (environmental) scanning electron microscope
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چکیده
منابع مشابه
X-Ray Microanalysis in the Variable Pressure (Environmental) Scanning Electron Microscope
Electron-excited x-ray microanalysis performed in the variable pressure and environmental scanning electron microscopes is subject to additional artifacts beyond those encountered in the conventional scanning electron microscope. Gas scattering leads to direct contributions to the spectrum from the environmental gas, as well as remote generation of x rays by electrons scattered out of the focus...
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ژورنال
عنوان ژورنال: Journal of Research of the National Institute of Standards and Technology
سال: 2002
ISSN: 1044-677X
DOI: 10.6028/jres.107.048