X-ray detector based on a bulk micromachined photodiode combined with a scintillating crystal
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چکیده
منابع مشابه
X-ray detector based on a bulk micromachined photodiode combined with a scintillating crystal
In this paper we report on the design, fabrication, assembly and testing of an x-ray detector based on a bulk micromachined photodiode (BMMPD) with a cavity filled with a scintillating crystal. The x-ray photons that reach the detector are first converted to visible light by the scintillating crystal. The visible light is then detected by the BMMPD, producing an electric current with a value pr...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2003
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/13/4/307