Wettability Modification of Polysilicon for Stiction Reduction in Silicon Based Micro-electromechanical Structures
نویسندگان
چکیده
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ژورنال
عنوان ژورنال: Solid State Phenomena
سال: 2001
ISSN: 1662-9779
DOI: 10.4028/www.scientific.net/ssp.76-77.23