منابع مشابه
Development of a Prototype Miniature Silicon Microgyroscope
A miniature vacuum-packaged silicon microgyroscope (SMG) with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including an automatic gain control (AGC) loop based on electrostatic force feedback is adopted in drive mod...
متن کاملA Digitalized Silicon Microgyroscope Based on Embedded FPGA
This paper presents a novel digital miniaturization method for a prototype silicon micro-gyroscope (SMG) with the symmetrical and decoupled structure. The schematic blocks of the overall system consist of high precision analog front-end interface, high-speed 18-bit analog to digital convertor, a high-performance core Field Programmable Gate Array (FPGA) chip and other peripherals such as high-s...
متن کاملA Low-cost Rate-grade Nickel Microgyroscope
This paper presents a low-cost microgyroscope with a resolution in the rate-grade at atmospheric pressure, which is fabricated using a CMOS compatible nickel electroplating process. Angular rate resolution of the gyroscope is increased by matching the resonance frequencies of the drive and sense modes close to each other using symmetric suspensions and electrostatic frequency tuning; whereas, u...
متن کاملThermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs
High force, large displacement and low voltage consumption are a primary concern for microgyroscopes. The chevron-shaped thermal actuators are unique in terms of high force generation combined with the large displacements at a low operating voltage in comparison with traditional electrostatic actuators. A Nickel based 3-DoF micromachined gyroscope comprising 2-DoF drive mode and 1-DoF sense mod...
متن کاملDevelopment of vibrating insoles.
The objective of this study was to describe the development of vibrating insoles. Insoles, providing a subsensory mechanical noise signal to the plantar side of the feet, may improve balance in healthy young and older people and in patients with stroke or diabetic neuropathy. This study describes the requirements for the tactors, (tactile actuators) insole material and noise generator. A search...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 1996
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.116.283