Vapor Phase Deposition of Cubic Boron Nitride Thin Films.
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Materia Japan
سال: 1994
ISSN: 1340-2625,1884-5843
DOI: 10.2320/materia.33.1168