Vapor deposition of molybdenum oxide using bis(ethylbenzene) molybdenum and water

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ژورنال

عنوان ژورنال: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

سال: 2016

ISSN: 0734-2101,1520-8559

DOI: 10.1116/1.4959532