منابع مشابه
Coupling of a vacuum-ultraviolet-radiation source to a processing system
A hollow capillary array is examined as a coupling window between an electron cyclotron resonance plasma vacuum ultraviolet vuv source and a separate processing chamber. The transmission of vuv through the capillary array as a function of wavelength is measured and shown to agree with theoretical calculations. A silicon wafer with a dielectric surface is then placed in the processing chamber an...
متن کاملHigh current hollow cathode as a radiometric transfer standard source for the extreme vacuum ultraviolet.
A high current hollow cathode source has been developed as a radiometric source standard for the extreme VUV. The source is operated at a constant current of 2 A with an aluminum cathode and helium or argon as buffer gas at pressures of ~1 hPa. The radiance of spectral lines in the wavelength range from 13 to 60 nm has been determined by comparison to the calculable spectral radiant power of th...
متن کاملAtomic Oscillator Strengths in the Vacuum Ultraviolet
We have developed techniques to measure branching fractions in the vacuum ultraviolet using diffraction grating spectroscopy and phosphor image plates as detectors. These techniques have been used to measure branching fractions in Fe II that give prominent emission lines in astrophysical objects.
متن کاملMeasuring vacuum ultraviolet radiation-induced damage
During plasma processing of semiconductors, ultraviolet ~UV! and vacuum ultraviolet ~VUV! radiation are present, but their effects can be difficult to separate from those due to charged particles incident on the wafer. The contribution of VUV photon irradiation to gate-oxide damage, and damage to dielectric materials in general, was examined using two measurement techniques that can predict the...
متن کاملFemtosecond spectroscopy with vacuum ultraviolet pulse pairs.
We combine different wavelengths from an intense high-order harmonics source with variable delay at the focus of a split-mirror interferometer to conduct pump-probe experiments on gas-phase molecules. We report measurements of the time resolution (<44 fs) and spatial profiles (4 μm × 12 μm) at the focus of the apparatus. We demonstrate the utility of this two-color, high-order-harmonic techniqu...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 1967
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.1720541