Vacuum measurement using total-internal-reflection heterodyne interferometry
نویسندگان
چکیده
منابع مشابه
Improved Small-Angle Sensor Based on Total-Internal Reflection and Surface Plasmon Resonance in Heterodyne Interferometry
In this paper, an improved small-angle sensor based on total-internal reflection (TIR) and surface plasmon resonance (SPR) in heterodyne interferometry (HI) is proposed. The improved small-angle sensor is designed as a reflective elongated prism made of BK7 glass. The shorter-side surface of the reflective elongated prism was coated with a 2 nm Ti film and a 45.5 nm Au film, but the longer-side...
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A small-displacement sensor based on total-internal reflection theory and surface plasmon resonance technology is proposed for use in heterodyne interferometry. A small displacement can be obtained simply by measuring the variation in phase difference between s- and p-polarization states with the small-displacement sensor. The theoretical displacement resolution of the small-displacement sensor...
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ژورنال
عنوان ژورنال: Precision Engineering
سال: 1999
ISSN: 0141-6359
DOI: 10.1016/s0141-6359(99)00019-7