Vacuum Gauge from Ultrathin MoS2 Transistor

نویسندگان

چکیده

We fabricate monolayer MoS2 field effect transistors and study their electric characteristics from 10^-6 Torr to atmospheric air pressure. show that the threshold voltage of transistor increases with growing Hence, we propose device as an pressure sensor, showing it is particularly suitable a low power consumption vacuum gauge. The functions on pressure-dependent O2, N2 H2O molecule adsorption affect n-doping channel.

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ژورنال

عنوان ژورنال: Lecture notes in electrical engineering

سال: 2021

ISSN: ['1876-1100', '1876-1119']

DOI: https://doi.org/10.1007/978-3-030-69551-4_7