Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems
نویسندگان
چکیده
منابع مشابه
Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems
Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors ~Q! in the range 10<Q<10. The minuscule active masses of these devices, in conjunction with their high Qs, translate into unprecedented inertial mass sensitivities. This makes them natural candidates for a variety of mass sensing applications. Here we evaluate the u...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2004
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.1642738