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Automatic kelvin probe compatible with ultrahigh vacuum
This article describes a new type of in situ ultrahigh-vacuum compatible kelvin probe based on a voice-coil driving mechanism. This design exhibits several advantages over conventional mechanical feed-through and (in situ) piezoelectric devices in regard to the possibility of multiple probe geometry, flexibility of probe geometry, amplitude of oscillation, and pure paranel vibration. Automatic ...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1986
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.29.10_461