Transport modeling of convection dominated helicon discharges in Proto-MPEX with the B2.5-Eirene code
نویسندگان
چکیده
منابع مشابه
Low-field helicon discharges
Operation of helicon discharges at magnetic fields B0 below 100 G is of interest for plasma etching and deposition reactors if high ion flux can be maintained with reduced field requirements. The theory of coupled helicon and Trivelpiece–Gould modes is summarized for uniform B0. Initial results from two experiments are reported. The first has a single 5 cm diameter tube with B0 = 0–100 G inject...
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Helicon discharges characteristically exhibit a sharp jump from low to high density as the radiofrequency (RF) power is raised. This is usually explained by the transition from an inductively coupled plasma (ICP) mode to a helicon mode when the dispersion relation for helicon wave propagation is satisfied at a critical power or magnetic field. Experiments have suggested a different mechanism fo...
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Helicon waves are waves in low-temperature, partially ionized plasmas in a dc magnetic field (B-field). The study of helicons involves both ion–neutral collisions and Larmor orbits, even when the B-field is uniform. Helicon discharges are ionized by helicon waves generated by a radiofrequency (RF) antenna. Interest in helicon discharges arose because of the high plasma densities they generate c...
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ژورنال
عنوان ژورنال: Physics of Plasmas
سال: 2017
ISSN: 1070-664X,1089-7674
DOI: 10.1063/1.5002534