Transformation Process of the Magnetron-Sputtered Ag2O Film in Hydrogen Annealing
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چکیده
منابع مشابه
Annealing studies of magnetron-sputtered CoCr thin films
The microstructure and magnetic properties of annealed CoCr thin films of various thicknesses, deposited on glass substrates, were examined. In general, little grain growth upon annealing was observed. Low-angle grain boundaries, present in as-sputtered films of thickness ~50nm, were absent in annealed films. This occurs simultaneously with a decrease in the measured electrical resistivity. A r...
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Microstructural features of sputtered chromium and chromium-50 wt. % platinum thin films on carbon substrates are presented. Films produced by rf sputtering and dc magnetron sputtering are compared using analytical electron microscopy techniques. All rf-sputtered films are uniform in chemistry and thickness and are amorphous. The chromium film became crystalline with a grain size ofless than 10...
متن کاملEffects of post-deposition annealing ambient on band alignment of RF magnetron-sputtered Y2O3 film on gallium nitride
The effects of different post-deposition annealing ambients (oxygen, argon, forming gas (95% N2 + 5% H2), and nitrogen) on radio frequency magnetron-sputtered yttrium oxide (Y2O3) films on n-type gallium nitride (GaN) substrate were studied in this work. X-ray photoelectron spectroscopy was utilized to extract the bandgap of Y2O3 and interfacial layer as well as establishing the energy band ali...
متن کاملAnnealing effect on ion-beam-sputtered titanium dioxide film.
We found that the extinction coefficient of ion-beam-sputtered titanium dioxide films first decreased with increasing annealing temperature then increased drastically when annealing temperature was increased above ~200 degrees C for 24 h of annealing time. The decreasing extinction coefficient with annealing temperature was attributed to a reduction in absorption owing to oxidation of the film ...
متن کاملEffect of DC power on the AlN plasma of magnetron sputtered thin film
AlN thin films deposited at room temperature by reactive DC magnetron sputtering of Al target in pure argon and nitrogen atmosphere. Thin films were deposited on glass and silicon (Si) substrate at different DC power. The variation of DC power on the structural, electrical and optical properties of the films were investigated. Enhancement of crystallinity and conductivity was observed with incr...
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ژورنال
عنوان ژورنال: Brazilian Journal of Physics
سال: 2013
ISSN: 0103-9733,1678-4448
DOI: 10.1007/s13538-013-0155-9