Transfer of the sputter technique for deposition of strongly thermochromic VO2-based coatings on ultrathin flexible glass to large-scale roll-to-roll device

The reversible semiconductor-to-metal transition of vanadium dioxide (VO 2 ) makes VO -based coatings a promising candidate for thermochromic smart windows, reducing the energy consumption buildings. We report on transfer sputter technique deposition strongly ZrO /W-doped /ZrO ultrathin (0.1 mm) flexible glass from laboratory-scale device with three (V, W and Zr) planar magnetron targets to large-scale roll-to-roll two (W-doped V rotatable targets. depositions were performed at relatively low substrate surface temperature (330–350 °C) without any bias voltage. W-doped layers deposited using reactive high-power impulse sputtering pulsed O flow control. compare process parameters used in both devices explain basic principle this discharge characteristics measured during deposition. characterize design, structure (X-ray diffraction) optical properties (spectrophotometry spectroscopic ellipsometry) three-layer coatings. prepared close 350 °C exhibit 22 °C, an integral luminous transmittance over 45% modulation solar approaching 10%. This is first step cost-effective high-rate preparation large-area future smart-window applications.