Three-Dimensional Transfer Functions of Interference Microscopes

Three-dimensional transfer functions (3D TFs) are generally assumed to fully describe the behavior of optical topography measuring instruments such as coherence scanning interferometers in spatial frequency domain. Therefore, 3D TFs supposed be independent surface under investigation resulting a clear separation properties and characteristics. In this paper, we show that TF an interference microscope differs depending on whether object is specularly reflecting or consists point scatterers. addition scatterer, will derive analytical expression for corresponding specular surfaces demonstrate being most relevant practical applications interferometry (CSI). We additionally study effects temporal disclose conventional CSI dominate. However, narrowband light sources advantageous if high components weak phase objects resolved, whereas, low-frequency higher amplitude, less affecting. Finally, present approach explains different characteristics peak detection signal analysis.