Thin films of aluminum nitride and aluminum gallium nitride for cold cathode applications
نویسندگان
چکیده
منابع مشابه
Cubic aluminum nitride and gallium nitride thin films prepared by pulsed laser deposition
Ž . Ž . The growth of cubic aluminum nitride AlN and cubic gallium nitride GaN is studied. The effects of ambient pressure and substrate temperature on the structure of the AlN and GaN films are systematically investigated. It is shown that the films are amorphous when the temperature and the pressure are too low. Cubic AlN is obtained at a temperature of 8008C and a pressure of 0.2 Torr. Cubic...
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Dedication To my parents, Gary and Carol, and to my loving girlfriend Connie. v Acknowledgements I would like to express my gratitude to my supervising, Professor Joe C. Campbell, for showing me the exciting world of nitride-based optoelectronic devices. His wise advice and constant support has been the most important aspect of my research, inspiring all of the work I have accomplished. Joe Cam...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 1997
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.120052