Thin film crystal growth template removal: Application to stress reduction in lead zirconate titanate microstructures
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چکیده
منابع مشابه
Microstereolithography of lead zirconate titanate thick film on silicon substrate
Ž . Ž . The microstereolithography mSL of lead zirconate titanate PZT thick films on platinum-buffered silicon substrates is reported for Ž . the first time in this paper. Crack-free PZT thick films 80–130 mm thick have been fabricated by laser direct-write UV polymerization from the HDDA-based UV curable PZT suspensions. The characterization of the fired films shows dielectric permittivities o...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2007
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.2801386