Thick DLC films deposited by PECVD on the internal surface of cylindrical substrates
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چکیده
منابع مشابه
Thick DLC Films Deposited By PECVD on the Internal Surface of Cylindrical Substrates
A new and exciting technique for performing DLC deposition on the inside of cylindrical substrates, in particular pipes, will be described. Using the hollow cathode effect (HCE), a high density plasma can be generated within such cylindrical substrates by using Plasma Enhanced Chemical Vapor Deposition (PECVD). As the pipe itself is the vacuum chamber, such high density plasmas can be maintaine...
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Diamond-like carbon (DLC) is a metastable form of amorphous carbon having large sp 3 bonding. DLC films have unique properties such as high hardness, low-friction, good transparency in IR region, chemical inertness and biocompatibility. To have better performance of the coating one should have proper selection of different parameters for deposition. In the present study, DLC films were deposite...
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ژورنال
عنوان ژورنال: Diamond and Related Materials
سال: 2008
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2008.01.051