Thermal UV treatment on SU-8 polymer for integrated optics
نویسندگان
چکیده
منابع مشابه
Thermal UV treatment on SU-8 polymer for integrated optics
We report a simple and low-cost method to fabricate SU-8-based polymer waveguide devices. The influence of hard-baking temperature on SU-8 polymer treated with or without UV radiation was investigated in detail. Based on these properties, the straight type, Y branch type, MarchZehnder (M-Z) type and 1 × 4 splitter waveguides were successfully fabricated. And a polymeric thermal-optic (TO) switc...
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Manufacturing tolerances for UV LIGA using SU-8 resist
Abstract UV LIGA involves the exposure of SU-8 negative resist, using a UV mask aligner, to produce high aspect ratio pillars or microchannels as part of the manufacturing process for microsystems. This has been made possible by the widespread use of a UV sensitive resist SU-8. Many papers have been written on the Fresnel diffraction theory of exposure, some key properties of SU-8 and prototype...
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In this work, three-dimensional 3D SU-8 microand nanostructures were fabricated using a reversal UV imprint process at low temperature and low pressure. The SU-8 polymer was coated on a patterned glass mold and then transferred onto various substrates by reversal UV imprint at a typical temperature of 50 °C, pressure of 1 MPa, and UV exposure of 1 s. The lower temperature and pressure used comp...
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ژورنال
عنوان ژورنال: Optical Materials Express
سال: 2014
ISSN: 2159-3930
DOI: 10.1364/ome.4.000509