Thermal Stability of Neodymium Aluminates High-κDielectric Deposited by Liquid Injection MOCVD Using Single-Source Heterometallic Alkoxide Precursors
نویسندگان
چکیده
منابع مشابه
SiC coatings grown by liquid injection chemical vapor deposition using single source metal-organic precursors
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ژورنال
عنوان ژورنال: Journal of Nanomaterials
سال: 2012
ISSN: 1687-4110,1687-4129
DOI: 10.1155/2012/891079