Thermal Plasma Chemical Vapor Deposition of SiC.
نویسندگان
چکیده
منابع مشابه
A Quantum Chemical Exploration of SiC Chemical Vapor Deposition
................................................................................................. iii Sammanfattning ..................................................................................... iv Acknowledgement ................................................................................... v List of included publications ..............................................................
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ژورنال
عنوان ژورنال: ISIJ International
سال: 1995
ISSN: 0915-1559
DOI: 10.2355/isijinternational.35.1381