Thermal Flow Sensor With a Bidirectional Thermal Reference
نویسندگان
چکیده
Conventional thermal flow sensors require samples to be heated; however, the temperature rise of measuring tools limits their use in biological applications. To address this limitation, study, we propose a sensor with bidirectional reference. We fabricated an integrated calorimetric and hot-film reference using Peltier module produce distribution that depends on rate. The enable high-resolution wide-range rate measurements microfluidic device without heating reagents cooling measurement mode. In addition, can used as typical by inverting current applied module. Computational fluid dynamics simulations experiments were performed evaluate performance modes. both modes, measured low rates resolution 100 nL/min, whereas wide range up 200 $\mu \text{L}$ /min. proposed expands switching between modes according sample maximum limit. [2022-0090]
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ژورنال
عنوان ژورنال: Journal of microelectromechanical systems
سال: 2022
ISSN: ['1941-0158', '1057-7157']
DOI: https://doi.org/10.1109/jmems.2022.3195169