Thermal decomposition of silicon nitride along with powder characteristics.

Corrosion Characteristics of Silicon Carbide and Silicon Nitride

The present work is a review of the substantial effort that has been made to measure and understand the effects of corrosion with respect to the properties, performance, and durability of various forms of silicon carbide and silicon nitride. The review encompasses corrosion in diverse environments, usually at temperatures of 1000 °C or higher. The environments include dry and moist oxygen, mixt...

Pattern Photoresist Silicon Silicon Nitride Silicon Photoresist Silicon Nitride Silicon Etch Nitride Remove Photoresist

In this proposal we seek to establish a porous silicon based etching process in the WTC microfabrication laboratory. The new process will allow us to etch high aspect ratio holes through a wafer. Holes like these are important for decreasing the dead volume of connections between micro and macro systems and for increasing the complexity of micro-fluidic systems. At the present time, the minimum...

Thermal conductivity and photoluminescence of light-emitting silicon nitride films

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Compressibility and thermal expansion of cubic silicon nitride

Dynamic Thermal Control of Silicon Nitride Photonic Integrated Circuits

Multiple heaters in photonic integrated circuits must be controlled accurately to achieve reliable performance of the thermooptic system. In this paper, we show wavelength stabilization using a system with unique design for silicon nitride circuits. Keywords; Thermooptic, dynamic, control, feedback