Thermal Anemometer Using a Micro-Air-Bridge Heater
نویسندگان
چکیده
منابع مشابه
Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater
A new structure thermal vacuum sensor with two pn junction diodes, Th-A and Th-B, as a high sensitive temperature sensor working like a thermistor and a micro heater formed on a micro air‒bridge is proposed. The micro air‒bridge is separated into two regions of A and B. The Th-A measures the temperature of the micro-heater formed on the region A and the Th-B does that of the region B which is c...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2005
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.125.124