Theory on Bending in Cantilever Beams With Adsorbed Islands

Bending of Beams with Unsymmetrical Sections

Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using dip coating. This bilayer cantilever is mounted in a humidity controlled AFM, and its deflection...

A Study on Non-linear Free Vibration of Cantilever Beams

Non-linear flexural vibration of beams with various boundary conditions such as hinged–hinged, clamped–clamped and clamped–hinged has been extensively studied using analytical approaches and numerical methods like FEM. A detailed review has been brought out by Rosenberg [1] and Satyamoorthy [2]. However, the investigation pertaining to the cantilever case, which is also of practical interest, i...

CMOS Chemical Microsensors Based on Resonant Cantilever Beams

We present a chemical gas sensor based on a resonating cantilever beam in CMOS MEMS technology. The sensor is actuated employing electrothermal actuation. Thus, for a 300 μ m long beam vibration amplitudes of 6.5 nm per mW heating power are achieved. The vibrations are detected with piezoresistors in a Wheatstone bridge scheme. Detection sensitivities above 200 μ V per mW heating power are meas...

Optically Activated ZnO/SiO, /Si Cantilever Beams

The photomechanical effect induced by periodically varying sub-bandgap illumination in thin ZnO films deposited on oxidized Si has been demonstrated for the first time. The efficiency of this effect is at least one order of magnitude higher as compared to the photothermal activation of Si. Thus it can be considered as a powerful optical drive for resonant sensors. A phenomenological model of th...