Tailoring Mesoporous Silicon Surface to Form a Versatile Template for Nanoparticle Deposition

Porous silicon (PS) can be used as a loading template in sensing or matrix to develop nanoparticle arrays. We present comprehensive study of PS morphology and optical properties before after the pore opening process, including determination thickness, size, density layers, its surface wettability, reflectivity. The samples were fabricated by electrochemical anodization monocrystalline wafer 5–20 wt.% hydrofluoric acid (HF) solution at current range 20–200 mA/cm2. Anodization was followed i.e., removal parasitic superficial layer with “bottleneck” structure reactive ion etching (RIE). results illustrate that “bottleneck”-free allows achieve high using low HF concentration reduced density. established this demonstrates higher hydrophobicity comparison RIE. applicability developed tested via filling pores silver nanoparticles, indicating potential use for fabrication