Structure and Mechanical Properties of Ti-Al-Ta-N Coatings Deposited by Direct Current and Middle-Frequency Magnetron Sputtering

Ti-Al-Ta-N coatings are characterized by attractive mechanical properties, thermal stability and oxidation resistance, which superior to ternary compositions, such as Ti-Al-N. However, because of their open columnar microstructure, the deposited conventional direct current magnetron sputtering (DCMS) exhibit insufficient wear resistance. This work is focused on obtaining with improved microstructure tribological properties middle-frequency (MFMS). The co-sputtering two separate targets (Ti-Al Ta) using pure DCMS MFMS modes well hybrid modes. It found that coating has a denser consisting fragmented grains interspersed equiaxed smaller grain size than coating, fully microstructure. modification results in simultaneous enhancement its hardness, toughness adhesion. As result, rate less half coating.