Structural investigations of copper nanorods by high-resolution TEM
نویسندگان
چکیده
منابع مشابه
Effect of downscaling nano-copper interconnects on the microstructure revealed by high resolution TEM-orientation-mapping.
In this work, a recently developed electron diffraction technique called diffraction scanning transmission electron microscopy (D-STEM) is coupled with precession electron microscopy to obtain quantitative local texture information in damascene copper interconnects (1.8 µm-70 nm in width) with a spatial resolution of less than 5 nm. Misorientation and trace analysis is performed to investigate ...
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ژورنال
عنوان ژورنال: Physical Review B
سال: 2000
ISSN: 0163-1829,1095-3795
DOI: 10.1103/physrevb.61.4968