Step-flow growth of nanolaminate Ti3SiC2 epitaxial layers on 4H-SiC(0001)
نویسندگان
چکیده
منابع مشابه
Single-step synthesis process of Ti3SiC2 ohmic contacts on 4H-SiC by sputter-deposition of Ti
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ژورنال
عنوان ژورنال: Scripta Materialia
سال: 2011
ISSN: 1359-6462
DOI: 10.1016/j.scriptamat.2011.03.013