Sputtered VO2 coatings on commercial glass substrates for smart glazing applications

VO2 is a well-known thermochromic material that can be potentially applied as coating on “smart” glazing systems. In this work films, were grown by the rf sputtering technique two different types of commercial glass substrates, namely fused silica and float glass, at low deposition temperature 300 °C. The optimum conditions, in order to succeed monoclinic phase VO2(M), investigated found subject substrate thickness. It was observed substrate, only films with thicknesses below 50 nm 3% O2 plasma exhibited behavior, displaying critical transition TC = 46.1 °C, width transmittance hysteresis loop 2000 ?TC 9.1 IR-switching ?TrIR 14.6%, integrated solar modulation ?Trsol 1.3% luminous 25 °C equal Trlum 36.6%. contrast, deposited demonstrated phase, for all thicknesses, when 1% plasma. These characterized much lower TC(<40 °C) ?TC<10 along significant thickness variations ?TrIR, parameters. Finally, rapid thermal annealing (RTA) used enhance performance greater than nm. differences might attributed composition each kind well diffusion phenomena between film substrate.