Sputter Deposition of Nanocones for Field Emission
نویسندگان
چکیده
منابع مشابه
Field emission properties of patterned boron nanocones.
Large area patterned boron nanocones with low turn-on electric field of 2.8 V microm(-1) and low threshold electric field of 3.8 V microm(-1) were synthesized by a pre-manipulation to pattern the catalyst with a grid template as mask. The good field emission performance of patterned boron nanocones arise from the decreased screening effect and a favorable orientation of the nanocones. These res...
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Metallic gold (Au) and platinum (Pt) thin films were deposited on silicon nanocones (Si-NCs) by sputtering to elucidate the effects of work function and conductivities on the field electron emission characteristics of surface-modified Si-NCs. The results showed that for Pt/Si-NCs and Au/Si-NCs, although the turn-on field defined at a corresponding current density of 10 μA cm(-2) only improved f...
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Sputter deposition is a widely used technique to deposit thin films on substrates. The technique is based upon ion bombardment of a source material, the target. Ion bombardment results in a vapor due to a purely physical process, i.e. the sputtering of the target material. Hence, this technique is part of the class of physical vapor deposition techniques, which includes, for example, thermal ev...
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Sputter deposition processes, especially for sputtering from metal targets, are well investigated. For practical reasons, i.e. for industrial processes, energetic considerations for sputter deposition are useful in order to optimize the sputtering process. In particular, for substrates at floating conditions it is required to obtain energetic conditions during film growth that enables sufficien...
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We have presented the kinetic study of the very initial growth stages of an ultra thin film (40Å-150Å) of Ag sputter-deposited on Si(001) substrate containing native oxide using grazing incidence x-ray reflectivity (GIXR) technique and Atomic Force Microscopy (AFM). We observe that the film consists of mounds with the presence of voids. The thickness 'd xray ' and the packing fraction 'η' of th...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 1997
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-471-237