Spatial Filtering Process in Monocolor Reproducing System (II)

Mask Aligner Process Enhancement by Spatial Filtering

Mask Aligners are used in the Semiconductor Industry to transfer structures with moderate resolution requirements onto substrates. With the casting of the shadow a photochemical reactive resist is exposed. As diffraction appears at the mask structures the exposure wavelength and the proximity gap between mask and wafer influence the quality of the image in the resist. As both parameters are ver...

Beam steering system and spatial filtering applied to interference lithography

Production of metrologically accurate interference patterns with subnanometer fidelity requires precise control of beam position and angle. We consider the beam stability requirements for the cases of interference by plane and spherical waves. Interferometers using beamsplitter cubes and diffraction gratings are among the analyzed topologies. The limitations of spatial filtering to remove angul...

Spatial filtering in multichannel magnetoencephalography.

Partial differential equations in boundary-value problems have been studied in order to estimate the influence of several geometrical and physical parameters involved in the outward transmission of the brain's magnetic field. Explicit Green kernels are used to obtain integral forms of generalized solutions which can be deduced from each other, as expressed over concentric spherical surfaces. Th...

A reproducing kernel-based spatial model in poisson regressions.

A semi-parametric spatial model for spatial dependence is proposed in Poisson regressions to study the effects of risk factors on incidence outcomes. The spatial model is constructed through an application of reproducing kernels. A Bayesian framework is proposed to infer the unknown parameters. Simulations are performed to compare the reproducing kernel-based method with several commonly used a...

B.5 Spatial Filtering