Sol-Gel Thin Film Processing for Integrated Waveguide Sensors

نویسندگان

چکیده

Integrated opto-chemical sensors present great advantages in comparison to the current lab equipment. They bring portability, reduced costs, facilitate in-situ measurements, as well largely sample volumes. In this quest, standard processing protocols over established materials, such silicon nitride, silicon, dioxide, titanium oxide, and even a wide variety of polymers have so far been key toward on-chip devices. However, if very specific materials terms composition tailored properties are required, deposition via solution represents viable alternative. review, we highlight role sol-gel chemistry top-down thin film layers design waveguide-based optical sensors. particular, stress porous based new approach increase sensitivity selectivity, first when used claddings, and, more recently, waveguides with enhanced light–analyte interaction. We finally discuss future perspectives devices specificity complex matrices, which is utmost importance for bio-sensing.

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ژورنال

عنوان ژورنال: Frontiers in Materials

سال: 2021

ISSN: ['2296-8016']

DOI: https://doi.org/10.3389/fmats.2021.629822