Smart-cut layer transfer of single-crystal SiC using spin-on-glass
نویسندگان
چکیده
منابع مشابه
Smart-Cut Layer Transfer of Single-Crystal SiC Using Spin-on-Glass
The authors demonstrate “smart-cut”-type layer transfer of single-crystal silicon carbide (SiC) by using spinon-glass (SoG) as an adhesion layer. Using SoG as an adhesion layer is desirable because it can planarize the surface, facilitate an initial low temperature bond, and withstand the thermal stresses at high temperature where layer splitting occurs (800–900 °C). With SoG, the bonding of wa...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
سال: 2012
ISSN: 2166-2746,2166-2754
DOI: 10.1116/1.4734006